MEMS Vibratory Gyroscopes Structural Approaches to Improve Robustness /
MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In part one, the dynamics of the...
Main Authors: | , |
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Corporate Author: | |
Format: | Electronic eBook |
Language: | English |
Published: |
Boston, MA :
Springer US,
2009.
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Series: | MEMS Reference Shelf,
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Subjects: | |
Online Access: | Full Text via HEAL-Link |
Table of Contents:
- Fundamentals of Micromachined Vibratory Gyroscopes
- Fundamentals of Micromachined Gyroscopes
- Fabrication Technologies
- Mechanical Design of MEMS Gyroscopes
- Electrical Design of MEMS Gyroscopes
- Structural Approaches to Improve Robustness
- Linear Multi DOF Architecture
- Torsional Multi DOF Architecture
- Distributed Mass Architecture
- Conclusions and Future Trends.