Mechanics of Microelectromechanical Systems
This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer’s viewpoint as devices that transform an input form of energy, such as thermal, electrostatic, electromagnetic or optical, into output mechanical motion...
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| Format: | Electronic eBook |
| Language: | English |
| Published: |
Boston, MA :
Springer US,
2005.
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| Online Access: | Full Text via HEAL-Link |
