Mechanics of Microelectromechanical Systems

This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer’s viewpoint as devices that transform an input form of energy, such as thermal, electrostatic, electromagnetic or optical, into output mechanical motion...

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Bibliographic Details
Main Authors: Lobontiu, Nicolae (Author), Garcia, Ephrahim (Author)
Corporate Author: SpringerLink (Online service)
Format: Electronic eBook
Language:English
Published: Boston, MA : Springer US, 2005.
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ΒΚΠ - Πατρα: ALFd

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