Introduction to Focused Ion Beams Instrumentation, Theory, Techniques and Practice /

• Corporate Author: SpringerLink (Online service)
• Other Authors: Giannuzzi, Lucille A. (Editor), Stevie, Fred A. (Editor)
• Format: Electronic eBook
• Language: English
• Published: Boston, MA : Springer US, 2005.
• Subjects: Physics.; Condensed matter.; Solid state physics.; Spectroscopy.; Microscopy.; Optical materials.; Electronic materials.; Materials > Surfaces.; Thin films.; Condensed Matter Physics.; Surfaces and Interfaces, Thin Films.; Optical and Electronic Materials.; Solid State Physics.; Spectroscopy and Microscopy.

The focused ion beam (FIB) instrument has experienced an intensive period of maturation since its inception. Numerous new techniques and applications have been brought to fruition, and over the past few years, the FIB has gained acceptance as more than just an expensive sample preparation tool. It h...