Introduction to Focused Ion Beams Instrumentation, Theory, Techniques and Practice /

• Συγγραφή απο Οργανισμό/Αρχή: SpringerLink (Online service)
• Άλλοι συγγραφείς: Giannuzzi, Lucille A. (Επιμελητής έκδοσης), Stevie, Fred A. (Επιμελητής έκδοσης)
• Μορφή: Ηλεκτρονική πηγή Ηλ. βιβλίο
• Γλώσσα: English
• Έκδοση: Boston, MA : Springer US, 2005.
• Θέματα: Physics.; Condensed matter.; Solid state physics.; Spectroscopy.; Microscopy.; Optical materials.; Electronic materials.; Materials > Surfaces.; Thin films.; Condensed Matter Physics.; Surfaces and Interfaces, Thin Films.; Optical and Electronic Materials.; Solid State Physics.; Spectroscopy and Microscopy.

The focused ion beam (FIB) instrument has experienced an intensive period of maturation since its inception. Numerous new techniques and applications have been brought to fruition, and over the past few years, the FIB has gained acceptance as more than just an expensive sample preparation tool. It h...

Πίνακας περιεχομένων:

• The Focused Ion Beam Instrument
• Ion - Solid Interactions
• Focused Ion Beam Gases for Deposition and Enhanced Etch
• Three-Dimensional Nanofabrication Using Focused Ion Beams
• Device Edits and Modifications
• The Uses of Dual Beam FIB in Microelectronic Failure Analysis
• High Resolution Live Imaging of FIB Milling Processes for Optimum Accuracy
• FIB for Materials Science Applications - a Review
• Practical Aspects of FIB Tem Specimen Preparation
• FIB Lift-Out Specimen Preparation Techniques
• A FIB Micro-Sampling Technique and a Site Specific TEM Specimen Preparation Method
• Dual-Beam (FIB-SEM) Systems
• Focused Ion Beam Secondary Ion Mass Spectrometry (FIB-SIMS)
• Quantitative Three-Dimensional Analysis Using Focused Ion Beam Microscopy
• Application of FIB in Combination with Auger Electron Spectroscopy.