Electroceramic-Based MEMS Fabrication-Technology and Applications /
The book is focused on the use of functional oxide and nitride films to enlarge the application range of MEMS (microelectromechanical systems), including micro-sensors, micro-actuators, transducers, and electronic components for microwaves and optical communications systems. Applications, emerging a...
Συγγραφή απο Οργανισμό/Αρχή: | SpringerLink (Online service) |
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Άλλοι συγγραφείς: | Setter, Nava (Επιμελητής έκδοσης) |
Μορφή: | Ηλεκτρονική πηγή Ηλ. βιβλίο |
Γλώσσα: | English |
Έκδοση: |
Boston, MA :
Springer US,
2005.
|
Σειρά: | Electronic Materials: Science and Technology,
9 |
Θέματα: | |
Διαθέσιμο Online: | Full Text via HEAL-Link |
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