Electroceramic-Based MEMS Fabrication-Technology and Applications /

• Corporate Author: SpringerLink (Online service)
• Other Authors: Setter, Nava (Editor)
• Format: Electronic eBook
• Language: English
• Published: Boston, MA : Springer US, 2005.
• Series: Electronic Materials: Science and Technology, 9
• Subjects: Materials science.; Electronics.; Microelectronics.; Optical materials.; Electronic materials.; Nanotechnology.; Materials Science.; Ceramics, Glass, Composites, Natural Methods.; Optical and Electronic Materials.; Electronics and Microelectronics, Instrumentation.; Characterization and Evaluation of Materials.

The book is focused on the use of functional oxide and nitride films to enlarge the application range of MEMS (microelectromechanical systems), including micro-sensors, micro-actuators, transducers, and electronic components for microwaves and optical communications systems. Applications, emerging a...

Table of Contents:

• Applications and Devices
• MEMS-Based Thin Film and Resonant Chemical Sensors
• Microactuators Based on Thin Films
• Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films
• Thick-Film Piezoelectric and Magnetostrictive Devices
• Micromachined Infrared Detectors Based on Pyroelectric Thin Films
• RF Bulk Acoustic Wave Resonators and Filters
• High Frequency Tuneable Devices Based on Thin Ferroelectric Films
• MEMS for Optical Functionality
• Materials, Fabrication-Technology, and Functionality
• Ceramic Thick Films for MEMS
• Thin Film Piezoelectrics for MEMS
• Science and Technology of High Dielectric Constant Thin Films and Materials Integration for Application to High Frequency Devices
• Permittivity, Tunability and Loss in Ferroelectrics for Reconfigurable High Frequency Electronics
• Microfabrication of Piezoelectric MEMS
• Non-Conventional Micro- and Nanopatterning Techniques for Electroceramics
• Low-Cost Patterning of Ceramic Thin Films.