Electroceramic-Based MEMS Fabrication-Technology and Applications /

• Corporate Author: SpringerLink (Online service)
• Other Authors: Setter, Nava (Editor)
• Format: Electronic eBook
• Language: English
• Published: Boston, MA : Springer US, 2005.
• Series: Electronic Materials: Science and Technology, 9
• Subjects: Materials science.; Electronics.; Microelectronics.; Optical materials.; Electronic materials.; Nanotechnology.; Materials Science.; Ceramics, Glass, Composites, Natural Methods.; Optical and Electronic Materials.; Electronics and Microelectronics, Instrumentation.; Characterization and Evaluation of Materials.

The book is focused on the use of functional oxide and nitride films to enlarge the application range of MEMS (microelectromechanical systems), including micro-sensors, micro-actuators, transducers, and electronic components for microwaves and optical communications systems. Applications, emerging a...