MEMS/NEMS Handbook Techniques and Applications /

• Corporate Author: SpringerLink (Online service)
• Other Authors: Leondes, Cornelius T. (Editor)
• Format: Electronic eBook
• Language: English
• Published: Boston, MA : Springer US, 2006.
• Subjects: Materials science.; Mechanical engineering.; Engineering design.; Electronics.; Microelectronics.; Optical materials.; Electronic materials.; Nanotechnology.; Materials Science.; Electronics and Microelectronics, Instrumentation.; Mechanical Engineering.; Engineering Design.; Optical and Electronic Materials.

Micro-Electro Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate. While the electronics are fabricated using integrated circuit (IC) process sequences (e.g., CMOS, Bipolar, or BICMOS processes), the micromechanical c...