MEMS/NEMS Handbook Techniques and Applications /

• Συγγραφή απο Οργανισμό/Αρχή: SpringerLink (Online service)
• Άλλοι συγγραφείς: Leondes, Cornelius T. (Επιμελητής έκδοσης)
• Μορφή: Ηλεκτρονική πηγή Ηλ. βιβλίο
• Γλώσσα: English
• Έκδοση: Boston, MA : Springer US, 2006.
• Θέματα: Materials science.; Mechanical engineering.; Engineering design.; Electronics.; Microelectronics.; Optical materials.; Electronic materials.; Nanotechnology.; Materials Science.; Electronics and Microelectronics, Instrumentation.; Mechanical Engineering.; Engineering Design.; Optical and Electronic Materials.

Micro-Electro Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate. While the electronics are fabricated using integrated circuit (IC) process sequences (e.g., CMOS, Bipolar, or BICMOS processes), the micromechanical c...

Πίνακας περιεχομένων:

• Manufacturing Advisory Service System for Concurrent and Collaborative Design of MEMS Devices
• Web-Enabled Knowledge-Intensive Support Framework for Collaborative Design of MEMS
• Web-Enabled Database System Development for Design and Manufacturing of Micro-Electro-Mechanical Systems (MEMS)
• Techniques in Proper Orthogonal Decomposition and Component Mode Synthesis for the Dynamic Simulation of Complex MEMS Devices and Their Applications
• Techniques in Global Optimal Design for MEMS & Their Applications
• Theory and Design of Micromechanical Vibratory Gyroscopes
• A Hierarchical Design Platform for Microelectrofluidic Systems (MEFS)
• Techniques in Electrostatics Analysis of MEMS and Their Applications
• Techniques for Efficient Analytical and Simulation Methods in the Prototyping of MEMS Systems
• Techniques in the Fabrication of High-Speed Micro-Rotors for MEMS Applications
• Fabrication Techniques in Micromachined Capacitive Ultrasonic Transducers and their Applications
• GaAs Thermally Based MEMS Devices—Fabrication Techniques, Characterization and Modeling
• Novel MEMS Fluidic Integrated Circuit Technology with ‘MOSFET-Like Microvalve Elements’
• Hydrogel-based ?TAS
• Crosslinked PMMA as a Low-Dimensional Dielectric Sacrificial Layer for MEMS/NEMS and Quantum Nanostructures Fabrication
• MEMS/NEMS Techniques and Applications
• Techniques in the Development of Micromachine Tool Prototypes & Their Applications in Microfactories MET Technology
• Tool-based Micro Machining and Applications in MEMS
• Micro-machined Passive Valves: Fabrication Techniques, Characterisation and their Application
• Rapid Prototyping and Rapid Tooling Techniques for the Manufacturing of Silicon, Polymer, Metal and Ceramic Microdevices
• Injection Molding Techniques for the Fabrication of MEMS Elements
• Excimer Laser Micromachined Three-dimensional Microstructures—Techniques and Applications
• Techniques in Scanning Acoustic Microscopy for Enhanced Failure and Material Analysis of Microsystems
• Production Scheduling in MEMS Manufacturing
• MEMS-based Accelerometers and their Application to Vibration Suppression in Hard Disk Drives
• Micromachined Thermal Accelerometer without Proof Mass
• Techniques in MEMS Devices for Micro Humidity Sensors and Their Applications
• Modeling the Electromechanical Response of Electrostatic Actuators
• Micropumps for MEMS/NEMS and Microfluidic Systems
• FEM (Finite Element Modeling) Techniques for Electrostatic Microactuators
• Techniques in the Design of Thermomechanical Microactuators
• Techniques in MEMS Microthermal Actuators and Their Applications
• Techniques in Residual Stress Measurement for MEMS and Their Applications
• Techniques in Sonophoresis Biomedical Devices and Their Applications
• MEMS Application of Actuators and Sensors for Glaucoma Treatment
• Single-Crystal Silicon Based Electrothermal MEMS Mirrors for Biomedical Imaging Applications
• Techniques in the Development of Endovascular Microtools & Their Applications
• Techniques in the Design and Fabrication of Optical MEMS Switches and their Application in Optical Communication Systems
• Micromachining Techniques and MEMS Structures in Optical Interferometric Sensors
• Magnetic Microactuators—Techniques and Applications
• Techniques in the Design of Micro-Machined Electrostatic Torsion Micro-Mirrors and Their Applications
• Vertical Combdrive Actuator: Design and Fabrication for Micromirror Applications
• Three-Dimensional Techniques for FEM Simulations in Laser Modules and Their Applications.