Principles and Applications of NanoMEMS Physics

• Main Author: Santos, Héctor J. De Los (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Boston, MA : Springer US, 2005.
• Series: Microsystems, 15
• Subjects: Materials science.; Quantum optics.; Lasers.; Photonics.; Electrical engineering.; Optical materials.; Electronic materials.; Nanotechnology.; Materials Science.; Optical and Electronic Materials.; Electrical Engineering.; Laser Technology, Photonics.; Quantum Optics.

Principles and Applications of NanoMEMS Physics presents the first unified exposition of the physical principles at the heart of NanoMEMS-based devices and applications. In particular, after beginning with a comprehensive presentation of the fundamentals and limitations of nanotechnology and MEMS fa...