Micro and Nanomanufacturing

• Main Author: Jackson, Mark J. (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Boston, MA : Springer US, 2007.
• Subjects: Engineering.; Mechanical engineering.; Nanotechnology.; Manufacturing industries.; Machines.; Tools.; Electronics.; Microelectronics.; Nanotechnology and Microengineering.; Mechanical Engineering.; Electronics and Microelectronics, Instrumentation.; Manufacturing, Machines, Tools.

Nanofabrication and nanotechnology present a great challenge to engineers and researchers as they manipulate atoms and molecules to produce single artifacts and submicron components/systems. Micro and Nanomanufacturing provides a comprehensive treatment of established micro & nano fabrication te...

Table of Contents:

• Principles of Micro- and Nanofabrication
• Microfabrication Using X- ray Lithography
• Manufacturing High Aspect Ratio Microstructures
• Meso-Micromachining
• Mechanical Micromachining
• Microgrinding
• Diamond Microcutting Tools
• Laser Micro- and Nanofabrication
• Micromachining Using Pulsed Water Droplets
• Diamond Nanogrinding
• Nanomachining
• Micro-and Nanomanufacturing.