Micro and Nanomanufacturing
Nanofabrication and nanotechnology present a great challenge to engineers and researchers as they manipulate atoms and molecules to produce single artifacts and submicron components/systems. Micro and Nanomanufacturing provides a comprehensive treatment of established micro & nano fabrication te...
| Κύριος συγγραφέας: | |
|---|---|
| Συγγραφή απο Οργανισμό/Αρχή: | |
| Μορφή: | Ηλεκτρονική πηγή Ηλ. βιβλίο |
| Γλώσσα: | English |
| Έκδοση: |
Boston, MA :
Springer US,
2007.
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| Θέματα: | |
| Διαθέσιμο Online: | Full Text via HEAL-Link |
Πίνακας περιεχομένων:
- Principles of Micro- and Nanofabrication
- Microfabrication Using X- ray Lithography
- Manufacturing High Aspect Ratio Microstructures
- Meso-Micromachining
- Mechanical Micromachining
- Microgrinding
- Diamond Microcutting Tools
- Laser Micro- and Nanofabrication
- Micromachining Using Pulsed Water Droplets
- Diamond Nanogrinding
- Nanomachining
- Micro-and Nanomanufacturing.