RF MEMS Switches and Integrated Switching Circuits Design, Fabrication, and Test /

• Main Author: Liu, Ai-Qun (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Boston, MA : Springer US : Imprint: Springer, 2010.
• Series: MEMS Reference Shelf, 5
• Subjects: Engineering.; Mechanical engineering.; Electronics.; Microelectronics.; Electronic circuits.; Circuits and Systems.; Mechanical Engineering.; Electronics and Microelectronics, Instrumentation.

Microelectromechanical Systems (MEMS) stand poised for the next major breakthrough in the silicon revolution that began with the transistor in the 1960s and has revolutionized microelectronics. MEMS allow one to not only observe and process information of all types from small scale systems, but also...