Dynamics of Microelectromechanical Systems

• Main Author: Lobontiu, Nicolae (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Boston, MA : Springer US, 2007.
• Series: Microsystems, 17
• Subjects: Engineering.; Computer-aided engineering.; Mechanical engineering.; Electronics.; Microelectronics.; Electronic circuits.; Nanotechnology.; Mechanical Engineering.; Electronics and Microelectronics, Instrumentation.; Circuits and Systems.; Computer-Aided Engineering (CAD, CAE) and Design.

This work presents a systematic view of the dynamics of MEMS (microelectromechanical systems), microstructures, and their responses. The focus is on the mecahnical/structural micro domain and the compliant nature of mechanical transmission. Features of this work include: An in-depth treatment of pro...

Table of Contents:

• Microcantilevers and Microbridges: Bending and Torsion Resonant Frequencies
• Micromechanical Systems: Modal Analysis
• Energy Losses in MEMS and Equivalent Viscous Damping
• Frequency and Time Response of MEMS.