Dynamics of Microelectromechanical Systems
This work presents a systematic view of the dynamics of MEMS (microelectromechanical systems), microstructures, and their responses. The focus is on the mecahnical/structural micro domain and the compliant nature of mechanical transmission. Features of this work include: An in-depth treatment of pro...
Κύριος συγγραφέας: | |
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Συγγραφή απο Οργανισμό/Αρχή: | |
Μορφή: | Ηλεκτρονική πηγή Ηλ. βιβλίο |
Γλώσσα: | English |
Έκδοση: |
Boston, MA :
Springer US,
2007.
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Σειρά: | Microsystems,
17 |
Θέματα: | |
Διαθέσιμο Online: | Full Text via HEAL-Link |
Πίνακας περιεχομένων:
- Microcantilevers and Microbridges: Bending and Torsion Resonant Frequencies
- Micromechanical Systems: Modal Analysis
- Energy Losses in MEMS and Equivalent Viscous Damping
- Frequency and Time Response of MEMS.