Functional Thin Films and Nanostructures for Sensors Synthesis, Physics and Applications /

• Corporate Author: SpringerLink (Online service)
• Other Authors: Fortin, Jeffrey (Editor), Zribi, Anis (Editor)
• Format: Electronic eBook
• Language: English
• Published: Boston, MA : Springer US, 2009.
• Series: Integrated Analytical Systems
• Subjects: Materials science.; Electronics.; Microelectronics.; Optical materials.; Electronic materials.; Nanotechnology.; Materials > Surfaces.; Thin films.; Materials Science.; Surfaces and Interfaces, Thin Films.; Electronics and Microelectronics, Instrumentation.; Optical and Electronic Materials.; Characterization and Evaluation of Materials.

Thin films and nanostructures can play multiple roles in a sensor including structural support, reliability enhancement, filtering and transduction. These micro and nano structured materials are discussed here in the context of transduction and how they contribute to the current sensor revolution. T...

Table of Contents:

• Sensor Design Guidelines
• Transduction Principles
• Growth and Synthesis of Nanostructured Thin Films
• Integrated Micromachining Technologies for Transducer Fabrication
• Applications of Functional Thin Films and Nanostructures in Gas Sensing
• Chemical Sensors: New Ideas for the Mature Field
• Applications of Functional Thin Films for Mechanical Sensing
• Sensing Infrared and Terahertz Regions by Functional Films.