APA (7th ed.) Citation

El-Kareh, B. (2009). Silicon Devices and Process Integration: Deep Submicron and Nano-Scale Technologies. Springer US.

Chicago Style (17th ed.) Citation

El-Kareh, Badih. Silicon Devices and Process Integration: Deep Submicron and Nano-Scale Technologies. Boston, MA: Springer US, 2009.

MLA (8th ed.) Citation

El-Kareh, Badih. Silicon Devices and Process Integration: Deep Submicron and Nano-Scale Technologies. Springer US, 2009.

Warning: These citations may not always be 100% accurate.