Silicon Devices and Process Integration Deep Submicron and Nano-Scale Technologies /
Silicon Devices and Process Integration is compiled from industrial and academic lecture notes and reflects years of experience in the development of silicon devices. It is prepared specifically for engineers and scientists in semiconductor research, development and manufacturing. It is also suitabl...
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| Format: | Electronic eBook |
| Language: | English |
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Boston, MA :
Springer US,
2009.
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| Online Access: | Full Text via HEAL-Link |
