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03201nam a22005055i 4500 |
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978-0-387-75577-9 |
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DE-He213 |
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20151125151851.0 |
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cr nn 008mamaa |
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100301s2008 xxu| s |||| 0|eng d |
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|a 9780387755779
|9 978-0-387-75577-9
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|a 10.1007/978-0-387-75577-9
|2 doi
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|d GrThAP
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|a T174.7
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|a TA418.9.N35
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|a TBN
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|a TEC027000
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|a SCI050000
|2 bisacsh
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|a 620.115
|2 23
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|a Cui, Zheng.
|e author.
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|a Nanofabrication
|h [electronic resource] :
|b Principles, Capabilities and Limits /
|c by Zheng Cui.
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| 264 |
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|a Boston, MA :
|b Springer US,
|c 2008.
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| 300 |
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|a XIV, 343 p. 177 illus.
|b online resource.
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| 336 |
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|a text
|b txt
|2 rdacontent
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| 337 |
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|a computer
|b c
|2 rdamedia
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|a online resource
|b cr
|2 rdacarrier
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| 347 |
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|a text file
|b PDF
|2 rda
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0 |
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|a Nanofabrication by Photons -- Nanofabrication by Charged Beams -- Nanofabrication by Scanning Probes -- Nanofabrication by Replication -- Nanoscale Pattern Transfer -- Indirect Nanofabrication -- Nanofabrication by Self-Assembly.
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| 520 |
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|a Nanofabrication: Principles, Capabilities and Limits presents a one-stop description at the introductory level on most technologies that have been developed which are capable of making structures below 100nm. Principles of each technology are introduced and illustrated with minimum mathematics involved. The capabilities of each technology in making sub-100nm structures are described. The limits of preventing a technology from further going down the dimensional scale are analyzed. Drawing upon years of practical experience and using numerous examples, Zheng Cui covers state-of-the art technologies in nanofabrication including: Photon-based lithography Charged particle beams lithography Nanofabrication using scanning probes Nanoscale replication Nanoscale pattern transfer Indirect nanofabrication Nanofabrication by self-assembly Nanofabrication: Principles, Capabilities and Limits will serve as a practical guide and first-hand reference for researchers and practitioners working in nanostructure fabrication and also provides a "tool box" of various techniques that can be easily adapted in different fields of applications. Written for: Nanoscience and nanotechnology researchers and engineers, technical professionals and academic researchers in the fields of electrtonics, mechanical engineering, and chemical engineering.
|
| 650 |
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0 |
|a Materials science.
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| 650 |
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0 |
|a Continuum mechanics.
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| 650 |
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0 |
|a Optical materials.
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| 650 |
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0 |
|a Electronic materials.
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| 650 |
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0 |
|a Nanotechnology.
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| 650 |
1 |
4 |
|a Materials Science.
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| 650 |
2 |
4 |
|a Nanotechnology.
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| 650 |
2 |
4 |
|a Materials Science, general.
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| 650 |
2 |
4 |
|a Continuum Mechanics and Mechanics of Materials.
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| 650 |
2 |
4 |
|a Optical and Electronic Materials.
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| 710 |
2 |
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|a SpringerLink (Online service)
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| 773 |
0 |
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|t Springer eBooks
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| 776 |
0 |
8 |
|i Printed edition:
|z 9780387755762
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| 856 |
4 |
0 |
|u http://dx.doi.org/10.1007/978-0-387-75577-9
|z Full Text via HEAL-Link
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| 912 |
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|a ZDB-2-CMS
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| 950 |
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|a Chemistry and Materials Science (Springer-11644)
|
