Nanofabrication Principles, Capabilities and Limits /

Nanofabrication: Principles, Capabilities and Limits presents a one-stop description at the introductory level on most technologies that have been developed which are capable of making structures below 100nm. Principles of each technology are introduced and illustrated with minimum mathematics invol...

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Bibliographic Details
Main Author: Cui, Zheng (Author)
Corporate Author: SpringerLink (Online service)
Format: Electronic eBook
Language:English
Published: Boston, MA : Springer US, 2008.
Subjects:
Online Access:Full Text via HEAL-Link
Table of Contents:
  • Nanofabrication by Photons
  • Nanofabrication by Charged Beams
  • Nanofabrication by Scanning Probes
  • Nanofabrication by Replication
  • Nanoscale Pattern Transfer
  • Indirect Nanofabrication
  • Nanofabrication by Self-Assembly.