Multi-Wafer Rotating MEMS Machines Turbines, Generators, and Engines /
Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines is an outgrowth of the MIT Micro Engine Project. This project began at the Massachusetts Institute of Technology in the Fall of 1995, and later expanded through collaborations with the Georgia Institute of Technology, the Clark At...
Συγγραφή απο Οργανισμό/Αρχή: | |
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Άλλοι συγγραφείς: | |
Μορφή: | Ηλεκτρονική πηγή Ηλ. βιβλίο |
Γλώσσα: | English |
Έκδοση: |
Boston, MA :
Springer US : Imprint: Springer,
2010.
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Σειρά: | MEMS Reference Shelf,
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Θέματα: | |
Διαθέσιμο Online: | Full Text via HEAL-Link |
Πίνακας περιεχομένων:
- to PowerMEMS
- System Design Considerations and Device Overview
- Materials, Structures and Packaging
- Microengine Fabrication
- Fabrication of Microscale Rotating Magnetic Machines
- High-Speed Gas Bearings for Micro-Turbomachinery
- Thermofluidics and Turbomachinery
- Motors and Generators
- Microcombustors for Rotating Machinery.