Control and Optimization of Multiscale Process Systems

• Main Authors: Christofides, Panagiotis D. (Author), Armaou, Antonios (Author), Lou, Yiming (Author), Varshney, Amit (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Boston : Birkhäuser Boston, 2009.
• Series: Control Engineering
• Subjects: Chemistry.; Chemical engineering.; System theory.; Mathematical models.; Mathematical optimization.; Control engineering.; Robotics.; Mechatronics.; Industrial engineering.; Production engineering.; Industrial Chemistry/Chemical Engineering.; Control, Robotics, Mechatronics.; Systems Theory, Control.; Optimization.; Industrial and Production Engineering.; Mathematical Modeling and Industrial Mathematics.

Interest in the control and optimization of multiscale process systems has been triggered by the need to achieve tight feedback control and optimal operation of complex processes, such as deposition and sputtering of thin films in semiconductor manufacturing, which are characterized by highly couple...