Applications of Finite Element Methods for Reliability Studies on ULSI Interconnections

• Main Authors: Tan, Cher Ming (Author), Li, Wei (Author), Gan, Zhenghao (Author), Hou, Yuejin (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: London : Springer London, 2011.
• Edition: 1.
• Series: Springer Series in Reliability Engineering,
• Subjects: Engineering.; Partial differential equations.; Computational intelligence.; Quality control.; Reliability.; Industrial safety.; Electronics.; Microelectronics.; Optical materials.; Electronic materials.; Quality Control, Reliability, Safety and Risk.; Computational Intelligence.; Electronics and Microelectronics, Instrumentation.; Optical and Electronic Materials.; Partial Differential Equations.

Applications of Finite Element Methods for Reliability Studies on ULSI Interconnections provides a detailed description of the application of finite element methods (FEMs) to the study of ULSI interconnect reliability. Over the past two decades the application of FEMs has become widespread and conti...

Table of Contents:

• 1. Introduction
• 2. Development of Physics-based Modeling for ULSI Interconnections Failure Mechanisms: Electromigration and Stress Induced Voiding
• 3. Introduction and General Theory of Finite Element Method
• 4. Finite Element Method for Electromigration Study
• 5. Finite Element Method for Stress Induced Voiding
• 6. Finite Element Method for Dielectric Reliability.