Materials Fundamentals of Gate Dielectrics

• Συγγραφή απο Οργανισμό/Αρχή: SpringerLink (Online service)
• Άλλοι συγγραφείς: Demkov, Alexander A. (Επιμελητής έκδοσης), Navrotsky, Alexandra (Επιμελητής έκδοσης)
• Μορφή: Ηλεκτρονική πηγή Ηλ. βιβλίο
• Γλώσσα: English
• Έκδοση: Dordrecht : Springer Netherlands, 2005.
• Θέματα: Physics.; Physical chemistry.; Electrical engineering.; Optical materials.; Electronic materials.; Physics, general.; Physical Chemistry.; Optical and Electronic Materials.; Electrical Engineering.

This book presents materials fundamentals of novel gate dielectrics that are being introduced into semiconductor manufacturing to ensure the continuous scalling of the CMOS devices. This is a very fast evolving field of research so we choose to focus on the basic understanding of the structure, ther...