Materials Fundamentals of Gate Dielectrics

• Corporate Author: SpringerLink (Online service)
• Other Authors: Demkov, Alexander A. (Editor), Navrotsky, Alexandra (Editor)
• Format: Electronic eBook
• Language: English
• Published: Dordrecht : Springer Netherlands, 2005.
• Subjects: Physics.; Physical chemistry.; Electrical engineering.; Optical materials.; Electronic materials.; Physics, general.; Physical Chemistry.; Optical and Electronic Materials.; Electrical Engineering.

This book presents materials fundamentals of novel gate dielectrics that are being introduced into semiconductor manufacturing to ensure the continuous scalling of the CMOS devices. This is a very fast evolving field of research so we choose to focus on the basic understanding of the structure, ther...