Defects in High-k Gate Dielectric Stacks Nano-Electronic Semiconductor Devices /

• Corporate Author: SpringerLink (Online service)
• Other Authors: Gusev, Evgeni (Editor)
• Format: Electronic eBook
• Language: English
• Published: Dordrecht : Springer Netherlands, 2006.
• Series: NATO Science Series II: Mathematics, Physics and Chemistry, 220
• Subjects: Engineering.; Condensed matter.; Electrical engineering.; Electronics.; Microelectronics.; Electrical Engineering.; Condensed Matter Physics.; Engineering, general.; Electronics and Microelectronics, Instrumentation.

The goal of this NATO Advanced Research Workshop (ARW) entitled “Defects in Advanced High-k Dielectric Nano-electronic Semiconductor Devices”, which was held in St. Petersburg, Russia, from July 11 to 14, 2005, was to examine the very complex scientific issues that pertain to the use of advanced hig...