Mechanics of Microelectronics

• Corporate Author: SpringerLink (Online service)
• Other Authors: Zhang, G. Q. (Editor), Driel, W. D. Van (Editor), Fan, X. J. (Editor)
• Format: Electronic eBook
• Language: English
• Published: Dordrecht : Springer Netherlands, 2006.
• Series: Solid mechanics and its applications, 141
• Subjects: Engineering.; Computational intelligence.; Mechanics.; Mechanics, Applied.; Mechanical engineering.; Theoretical and Applied Mechanics.; Mechanical Engineering.; Computational Intelligence.

From a mechanical engineering point of view, Microelectronics and Microsystems are multi-scale in both geometric and time domains, multi-process, multi-functionality, multi-disciplinary, multi-material/interface, multi-damage and multi-failure mode. Their responses in manufacturing, assembling, qual...