Micromanufacturing International Research and Development /

We have come to know that our ability to survive and grow as a nation to a very large degree depends upon our sci- tific progress. Moreover, it is not enough simply to keep abreast of the rest of the world in scientific matters. We 1 must maintain our leadership. President Harry Truman spoke those w...

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Bibliographic Details
Main Authors: Ehmann, Kornel F. (Author), Bourell, David (Author), Culpepper, Martin L. (Author), Hodgson, Thom J. (Author), Kurfess, Thomas R. (Author), Madou, Marc (Author), Rajurkar, Kamlakar (Author), Devor, Richard (Author)
Corporate Author: SpringerLink (Online service)
Format: Electronic eBook
Language:English
Published: Dordrecht : Springer Netherlands, 2007.
Subjects:
Online Access:Full Text via HEAL-Link
Table of Contents:
  • From the contents Foreword
  • Table of Contents
  • List of Figures
  • List of Tables
  • Executive Summary
  • 1. Introduction: Richard E. DeVor and Kornel F. Ehmann
  • 2. Design: Martin L. Culpepper and Thomas R. Kurfess
  • 3. Materials: David Bourell and Kamlakar Rajurkar
  • 4. Processes: Kamlakar Rajurkar and Marc Madou
  • 5. Metrology, Sensors and Control: Thomas R. Kurfess and Thom J. Hodgson
  • 6. Non-lithography Applications: Marc Madou
  • 7. Business, Education, the Environment, and Other Issues: Thom J. Hodgson
  • Appendices: A. Panelist Biographies
  • B. Questionnaire for Site Visits
  • C. Site Reports—Asia
  • D. Site Reports—Europe
  • E. Glossary.