Hartzell, A. L., da Silva, M. G., & Shea, H. R. (2011). MEMS Reliability. Springer US : Imprint: Springer.
Chicago Style (17th ed.) CitationHartzell, Allyson L., Mark G. da Silva, and Herbert R. Shea. MEMS Reliability. Boston, MA: Springer US : Imprint: Springer, 2011.
MLA (8th ed.) CitationHartzell, Allyson L., et al. MEMS Reliability. Springer US : Imprint: Springer, 2011.
Warning: These citations may not always be 100% accurate.