MEMS Reliability

Successfully bringing MEMS-based products to market hinges on engineering the component to have sufficient reliability for the intended application, yet the reliability and qualification methodology for MEMS based products is not widely understood. Companies that have a deep understanding of MEMS re...

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Bibliographic Details
Main Authors: Hartzell, Allyson L. (Author), da Silva, Mark G. (Author), Shea, Herbert R. (Author)
Corporate Author: SpringerLink (Online service)
Format: Electronic eBook
Language:English
Published: Boston, MA : Springer US : Imprint: Springer, 2011.
Series:MEMS Reference Shelf,
Subjects:
Online Access:Full Text via HEAL-Link

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