MEMS Reliability

• Main Authors: Hartzell, Allyson L. (Author), da Silva, Mark G. (Author), Shea, Herbert R. (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Boston, MA : Springer US : Imprint: Springer, 2011.
• Series: MEMS Reference Shelf,
• Subjects: Engineering.; Electronics.; Microelectronics.; Electronics and Microelectronics, Instrumentation.

Successfully bringing MEMS-based products to market hinges on engineering the component to have sufficient reliability for the intended application, yet the reliability and qualification methodology for MEMS based products is not widely understood. Companies that have a deep understanding of MEMS re...

Table of Contents:

• Introduction
• Reliability /Weibull, bathtub curve, basics (What is reliability?)
• Failure Modes and Physics of Failure (POF)
• Strategies for identifying root cause (FMEA)
• Manufacturing Processes & Procedures
• Testing & Qualification Processes & Procedures
• Improving Reliability: Techniques and Tools
• Design for Reliability (DFR).