MEMS Linear and Nonlinear Statics and Dynamics

• Main Author: Younis, Mohammad I. (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Boston, MA : Springer US : Imprint: Springer, 2011.
• Series: Microsystems, 20
• Subjects: Engineering.; Statistical physics.; Dynamical systems.; Electronics.; Microelectronics.; Electronic circuits.; Nanotechnology.; Electronics and Microelectronics, Instrumentation.; Circuits and Systems.; Statistical Physics, Dynamical Systems and Complexity.

MEMS Linear and Nonlinear Statics and Dynamics presents the necessary analytical and computational tools for MEMS designers to model and simulate most known MEMS devices, structures, and phenomena. This book also provides an in-depth analysis and treatment of the most common static and dynamic pheno...

Table of Contents:

• MEMS and their unique behavior
• Lumped modeling principles
• Lumped modeling of MEMS devices
• Introduction to nonlinear mechanics
• Introduction to nonlinear oscillations
• Introduction to structural mechanics
• Introduction to computational methods in MEMS
• Special Topic I: Global dynamics of electrostatically actuated devices
• Special Topic II: Sticktion and adhesion of microbeams due to electrostatic and capillary forces
• Special Topic III: Mechanical shock of microstructures.