Silicon Carbide Microsystems for Harsh Environments
<p><em>Silicon Carbide Microsystems for Harsh Environments</em> reviews state-of-the-art Silicon Carbide (SiC) technologies that, when combined, create microsystems capable of surviving in harsh environments. Technological readiness of the system components, key issues when integra...
| Main Authors: | , |
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| Corporate Author: | |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
New York, NY :
Springer New York,
2011.
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| Series: | MEMS Reference Shelf,
22 |
| Subjects: | |
| Online Access: | Full Text via HEAL-Link |
