Silicon Carbide Microsystems for Harsh Environments

• Main Authors: Wijesundara, Muthu B.J (Author), Azevedo, Robert (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: New York, NY : Springer New York, 2011.
• Series: MEMS Reference Shelf, 22
• Subjects: Engineering.; Nanotechnology.; Electronics.; Microelectronics.; Electronic circuits.; Electronics and Microelectronics, Instrumentation.; Circuits and Systems.; Nanotechnology and Microengineering.

<p><em>Silicon Carbide Microsystems for Harsh Environments</em> reviews state-of-the-art Silicon Carbide (SiC) technologies that, when combined, create microsystems capable of surviving in harsh environments. Technological readiness of the system components, key issues when integra...

Table of Contents:

• Introduction to Harsh MEMs
• Silicon Carbide Processing
• Silicon Carbide Electronics
• Silicon Carbide MEMS Devices
• Silicon Carbide MEMs Device Packaging
• System Integration.