Microelectronic Test Structures for CMOS Technology

• Main Authors: Bhushan, Manjul (Author), Ketchen, Mark B. (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: New York, NY : Springer New York : Imprint: Springer, 2011.
• Subjects: Engineering.; Electronics.; Microelectronics.; Electronic circuits.; Optical materials.; Electronic materials.; Electronics and Microelectronics, Instrumentation.; Optical and Electronic Materials.; Circuits and Systems.

Microelectronic Test Structures for CMOS Technology and Products addresses the basic concepts of the design of test structures for incorporation within test-vehicles, scribe-lines, and CMOS products. The role of test structures in the development and monitoring of CMOS technologies and products has...

Table of Contents:

• Introduction
• Test Structure Basics
• Resistors
• Capacitors
• MOSFETs
• Ring Oscillators
• High Speed Characterization
• Test Structures of SOI Technology
• Test Equipment and Measurements
• Data Analysis.