Advanced Mechatronics and MEMS Devices

• Συγγραφή απο Οργανισμό/Αρχή: SpringerLink (Online service)
• Άλλοι συγγραφείς: Zhang, Dan (Επιμελητής έκδοσης)
• Μορφή: Ηλεκτρονική πηγή Ηλ. βιβλίο
• Γλώσσα: English
• Έκδοση: New York, NY : Springer New York : Imprint: Springer, 2013.
• Σειρά: Microsystems, 23
• Θέματα: Engineering.; Nanotechnology.; Control engineering.; Robotics.; Mechatronics.; Biomedical engineering.; Nanotechnology and Microengineering.; Control, Robotics, Mechatronics.; Biomedical Engineering.

Advanced Mechatronics and MEMS Devicesdescribes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. The evolution of design in microfabrication, as well as emerging issues in nanomaterials, micromachining, micromanufacturing and microassembly...