Advanced Mechatronics and MEMS Devices

• Corporate Author: SpringerLink (Online service)
• Other Authors: Zhang, Dan (Editor)
• Format: Electronic eBook
• Language: English
• Published: New York, NY : Springer New York : Imprint: Springer, 2013.
• Series: Microsystems, 23
• Subjects: Engineering.; Nanotechnology.; Control engineering.; Robotics.; Mechatronics.; Biomedical engineering.; Nanotechnology and Microengineering.; Control, Robotics, Mechatronics.; Biomedical Engineering.

Advanced Mechatronics and MEMS Devicesdescribes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. The evolution of design in microfabrication, as well as emerging issues in nanomaterials, micromachining, micromanufacturing and microassembly...

Table of Contents:

• Development of a Silicon Based MEMS6-DoF-Force/Torque-Sensor
• Piezoelectrically Actuated Robotic End-effector with Strain Amplification Mechanisms
•  Autocalibration of MEMS Accelerometers
• Miniaturization of Micromanipulation Tools
• Digital Microrobotics Using MEMS Technology
• Flexure-based Parallel-Kinematics Stages for Passive Assembly of MEMS Optical Switches
• Micro-Tactile Sensors for Measurement of In-Vivo Young’s Modulus and Shear Modulus of Elasticity
• Devices and techniques for micro-gripping
• A Wall-climbing Robot with Biomimetic Adhesive Pedrail
• Development of Bio-inspired Artificial Sensory Cilia
• Jumping Like an Insect: from Bio-mimetic Inspiration to a Jumping Mini Robot Design
• Modeling and H∞ PID Plus Feedforward Controller Design for an Electrohydraulic Actuator (EHA) System.  .