Interfacial Compatibility in Microelectronics Moving Away from the Trial and Error Approach /

• Main Authors: Laurila, Tomi (Author), Vuorinen, Vesa (Author), Paulasto-Kröckel, Mervi (Author), Turunen, Markus (Author), Mattila, Toni T. (Author), Kivilahti, Jorma (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: London : Springer London, 2012.
• Series: Microsystems,
• Subjects: Engineering.; Nanotechnology.; Optical materials.; Electronic materials.; Materials > Surfaces.; Thin films.; Nanotechnology and Microengineering.; Surfaces and Interfaces, Thin Films.; Optical and Electronic Materials.

Interfaces between dissimilar materials are met everywhere in microelectronics and microsystems. In order to ensure faultless operation of these highly sophisticated structures, it is mandatory to have fundamental understanding of materials and their interactions in the system. In this difficult tas...