APA (7th ed.) Citation

SpringerLink (Online service) & Hwang, C. S. (2014). Atomic Layer Deposition for Semiconductors. Springer US : Imprint: Springer.

Chicago Style (17th ed.) Citation

SpringerLink (Online service) and Choel Seong Hwang. Atomic Layer Deposition for Semiconductors. Boston, MA: Springer US : Imprint: Springer, 2014.

MLA (8th ed.) Citation

SpringerLink (Online service) and Choel Seong Hwang. Atomic Layer Deposition for Semiconductors. Springer US : Imprint: Springer, 2014.

Warning: These citations may not always be 100% accurate.