Piezoresistor Design and Applications

• Main Authors: Doll, Joseph C. (Author), Pruitt, Beth L. (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: New York, NY : Springer New York : Imprint: Springer, 2013.
• Series: Microsystems and Nanosystems ; 1
• Subjects: Engineering.; Mechanics.; Mechanics, Applied.; Electronics.; Microelectronics.; Optical materials.; Electronic materials.; Electronics and Microelectronics, Instrumentation.; Optical and Electronic Materials.; Theoretical and Applied Mechanics.

This book is a comprehensive guide to piezoresistive MEMS sensor design. Piezoresistors transduce mechanical loads into electrical signals via a resistance change, and comprise a substantial portion of the commercial MEMS sensors market. Applications of piezoresistors include strain gauges, accelero...

Table of Contents:

• Introduction
• Piezoresistance fundamentals
• Sensitivity, noise and resolution
• Fabrication and process modeling
• Temperature effects
• Design optimization
• Alternative materials and transduction methods.