Integration of Functional Oxides with Semiconductors

• Κύριοι συγγραφείς: Demkov, Alexander A. (Συγγραφέας), Posadas, Agham B. (Συγγραφέας)
• Συγγραφή απο Οργανισμό/Αρχή: SpringerLink (Online service)
• Μορφή: Ηλεκτρονική πηγή Ηλ. βιβλίο
• Γλώσσα: English
• Έκδοση: New York, NY : Springer New York : Imprint: Springer, 2014.
• Θέματα: Engineering.; Semiconductors.; Electronics.; Microelectronics.; Optical materials.; Electronic materials.; Electronics and Microelectronics, Instrumentation.; Optical and Electronic Materials.

This unique book describes the basic physical principles of the oxide/semiconductor epitaxy and offers a view of the current state of the field. It shows how this technology enables large-scale integration of oxide electronic and photonic devices, and describes possible hybrid semiconductor/oxide sy...

Πίνακας περιεχομένων:

• Introduction
• Critical issues in Oxide-Semiconductor Heteroepitaxy
• Predictive Engineering of Semiconductor-Oxide Interfaces
• Crystalline Functional Oxide Growth Methods
• Thin Oxide Film Characterization Methods
• Growing SrTiO3 on Si (001) by Molecular Beam Epitaxy
• Integration of Functional Oxides on SrTiO3/Si Pseudo-Substrates
• Other Epitaxial Oxides on Semiconductors
• Outlook and Parting Thoughts
• Appendices.