Integration of Functional Oxides with Semiconductors

• Main Authors: Demkov, Alexander A. (Author), Posadas, Agham B. (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: New York, NY : Springer New York : Imprint: Springer, 2014.
• Subjects: Engineering.; Semiconductors.; Electronics.; Microelectronics.; Optical materials.; Electronic materials.; Electronics and Microelectronics, Instrumentation.; Optical and Electronic Materials.

This unique book describes the basic physical principles of the oxide/semiconductor epitaxy and offers a view of the current state of the field. It shows how this technology enables large-scale integration of oxide electronic and photonic devices, and describes possible hybrid semiconductor/oxide sy...

Table of Contents:

• Introduction
• Critical issues in Oxide-Semiconductor Heteroepitaxy
• Predictive Engineering of Semiconductor-Oxide Interfaces
• Crystalline Functional Oxide Growth Methods
• Thin Oxide Film Characterization Methods
• Growing SrTiO3 on Si (001) by Molecular Beam Epitaxy
• Integration of Functional Oxides on SrTiO3/Si Pseudo-Substrates
• Other Epitaxial Oxides on Semiconductors
• Outlook and Parting Thoughts
• Appendices.