Materials for Information Technology Devices, Interconnects and Packaging /

The fast-developing information technology industry is driving a need for new materials in order to facilitate the development of more reliable microelectronic products. Materials for Information Technology is an up-to-date overview of current developments and R&D activities in the field of mate...

Πλήρης περιγραφή

Λεπτομέρειες βιβλιογραφικής εγγραφής
Συγγραφή απο Οργανισμό/Αρχή: SpringerLink (Online service)
Άλλοι συγγραφείς: Zschech, Ehrenfried (Επιμελητής έκδοσης), Whelan, Caroline (Επιμελητής έκδοσης), Mikolajick, Thomas (Επιμελητής έκδοσης)
Μορφή: Ηλεκτρονική πηγή Ηλ. βιβλίο
Γλώσσα:English
Έκδοση: London : Springer London, 2005.
Σειρά:Engineering Materials and Processes,
Θέματα:
Διαθέσιμο Online:Full Text via HEAL-Link
Πίνακας περιεχομένων:
  • Recent Advances in Thin-film Deposition
  • Molecular-beam Deposition of High-k Gate Dielectrics for Advanced CMOS
  • LEPECVD — A Production Technique for SiGe MOSFETs and MODFETs
  • Thin-film Engineering by Atomic-layer Deposition for Ultra-scaled and Novel Devices
  • Atomic-layer Deposited Barrier and Seed Layers for Interconnects
  • Copper CVD for Conformal Ultrathin-film Deposition
  • Pushing PVD to the Limits — Recent Advances
  • Surface Engineering Using Self-assembled Monolayers: Model Substrates for Atomic-layer Deposition
  • Selective Airgaps: Towards a Scalable Low-k Solution
  • Silicides — Recent Advances and Prospects
  • TEM Characterization of Strained Silicon
  • Material Aspects of Non-Volatile Memories
  • An Introduction to Nonvolatile Memory Technology
  • Floating-dot Memory Transistors on SOI Substrate
  • Ion-beam Synthesis of Nanocrystals for Multidot Memory Structures
  • Scaling of Ferroelectric-based Memory Concepts
  • Device Concepts with Magnetic Tunnel Junctions
  • Phase-change Memories
  • Amorphous-to-fcc Transition in GeSbTe Alloys
  • Organic Nonvolatile Memories
  • Materials for Interconnects
  • Interconnect Technology — Today, Recent Advances and a Look into the Future
  • Dielectric and Scaling Effects on Electromigration for Cu Interconnects
  • Texture and Stress Study of Sub-Micron Copper Interconnect Lines Using X-ray Microdiffraction
  • Stress Modeling for Copper Interconnect Structures
  • Conductivity Enhancement in Metallization Structures of Regular Grains
  • Advanced Barriers for Copper Interconnects
  • Synthesis and Characterization of Compounds Obtained by Crosslinking of Polymethylhydrosiloxane by Aromatic Rings
  • Revealing the Porous Structure of Low-k Materials Through Solvent Diffusion
  • Carbon Nanotube Via Technologies for Future LSI Interconnects
  • Nickel Nanowires Obtained by Template Synthesis
  • Materials for Assembly/Packaging
  • The Importance of Polymers in Wafer-Level Packaging
  • Electrically Conductive Adhesives as Solder Alternative: A Feasible Challenge
  • The Role of Au/Sn Solder in Packaging
  • Packaging Materials: Organic-Inorganic Hybrids for Millimetre-Wave Optoelectronics
  • Wafer-Level Three-Dimensional Hyper-Integration Technology Using Dielectric Adhesive Wafer Bonding
  • Advanced Materials Characterization
  • Challenges to Advanced Materials Characterization for ULSI Applications
  • Advanced Material Characterization by TOFSIMS in Microelectronic
  • Electronic Properties of the Interface Formed by Pr2O3 Growth on Si(001), Si(111) and SiC(0001) Surfaces
  • Materials Characterization by Ellipsometry
  • Thermal Desorption Spectrometry as a Method of Analysis for Advanced Interconnect Materials
  • Electron Backscatter Diffraction: Application to Cu Interconnects in Top-View and Cross Section
  • X-ray Reflectivity Characterisation of Thin-Film and Multilayer Structures.