Precision Motion Control Design and Implementation /

• Main Authors: Kiong, Tan Kok (Author), Heng, Lee Tong (Author), Sunan, Huang (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: London : Springer London, 2008.
• Edition: Second Edition.
• Series: Advances in Industrial Control,
• Subjects: Engineering.; Vibration.; Dynamical systems.; Dynamics.; Control engineering.; Robotics.; Mechatronics.; Manufacturing industries.; Machines.; Tools.; Electronics.; Microelectronics.; Nanotechnology.; Control.; Manufacturing, Machines, Tools.; Control, Robotics, Mechatronics.; Vibration, Dynamical Systems, Control.; Electronics and Microelectronics, Instrumentation.

Applications of precision engineering, generally defined as manufacturing to tolerances that are better than one part in 105, abound and can be found in various semiconductor processes (e.g., lithography, wafer probing, inspection), co-ordinate measuring machines, precision metrology systems (e.g.,...