Precision Motion Control Design and Implementation /

• Κύριοι συγγραφείς: Kiong, Tan Kok (Συγγραφέας), Heng, Lee Tong (Συγγραφέας), Sunan, Huang (Συγγραφέας)
• Συγγραφή απο Οργανισμό/Αρχή: SpringerLink (Online service)
• Μορφή: Ηλεκτρονική πηγή Ηλ. βιβλίο
• Γλώσσα: English
• Έκδοση: London : Springer London, 2008.
• Έκδοση: Second Edition.
• Σειρά: Advances in Industrial Control,
• Θέματα: Engineering.; Vibration.; Dynamical systems.; Dynamics.; Control engineering.; Robotics.; Mechatronics.; Manufacturing industries.; Machines.; Tools.; Electronics.; Microelectronics.; Nanotechnology.; Control.; Manufacturing, Machines, Tools.; Control, Robotics, Mechatronics.; Vibration, Dynamical Systems, Control.; Electronics and Microelectronics, Instrumentation.

Applications of precision engineering, generally defined as manufacturing to tolerances that are better than one part in 105, abound and can be found in various semiconductor processes (e.g., lithography, wafer probing, inspection), co-ordinate measuring machines, precision metrology systems (e.g.,...