Precision Motion Control Design and Implementation /
Applications of precision engineering, generally defined as manufacturing to tolerances that are better than one part in 105, abound and can be found in various semiconductor processes (e.g., lithography, wafer probing, inspection), co-ordinate measuring machines, precision metrology systems (e.g.,...
Κύριοι συγγραφείς: | , , |
---|---|
Συγγραφή απο Οργανισμό/Αρχή: | |
Μορφή: | Ηλεκτρονική πηγή Ηλ. βιβλίο |
Γλώσσα: | English |
Έκδοση: |
London :
Springer London,
2008.
|
Έκδοση: | Second Edition. |
Σειρά: | Advances in Industrial Control,
|
Θέματα: | |
Διαθέσιμο Online: | Full Text via HEAL-Link |
Πίνακας περιεχομένων:
- Precision Tracking Motion Control
- Automatic Tuning of Control Parameters
- Co-ordinated Motion Control of Gantry Systems
- Geometrical Error Compensation
- Electronic Interpolation Errors
- Vibration Monitoring and Control
- Other Engineering Aspects.