Silver Metallization Stability and Reliability /
Silver has the lowest resistivity of all metals, which makes it an attractive interconnect material for higher current densities and faster switching speeds in integrated circuits. Over the past ten years, extensive research has been conducted to address the thermal and electrical stability, as well...
Κύριοι συγγραφείς: | , , |
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Συγγραφή απο Οργανισμό/Αρχή: | |
Μορφή: | Ηλεκτρονική πηγή Ηλ. βιβλίο |
Γλώσσα: | English |
Έκδοση: |
London :
Springer London,
2008.
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Σειρά: | Engineering Materials and Processes,
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Θέματα: | |
Διαθέσιμο Online: | Full Text via HEAL-Link |
Πίνακας περιεχομένων:
- Silver Thin Film Characterization
- Diffusion Barriers and Self-encapsulation
- Thermal Stability
- Silver Electromigration Resistance
- Integration Issues
- Summary.