Precision Nanometrology Sensors and Measuring Systems for Nanomanufacturing /

• Main Author: Gao, Wei (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: London : Springer London, 2010.
• Series: Springer Series in Advanced Manufacturing,
• Subjects: Engineering.; Surfaces (Physics).; Interfaces (Physical sciences).; Thin films.; Physical measurements.; Measurement.; Nanotechnology.; Control engineering.; Robotics.; Mechatronics.; Manufacturing industries.; Machines.; Tools.; Nanotechnology and Microengineering.; Surface and Interface Science, Thin Films.; Control, Robotics, Mechatronics.; Manufacturing, Machines, Tools.; Measurement Science and Instrumentation.

Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of surface forms of precision workpieces and to...