Precision Nanometrology Sensors and Measuring Systems for Nanomanufacturing /

• Κύριος συγγραφέας: Gao, Wei (Συγγραφέας)
• Συγγραφή απο Οργανισμό/Αρχή: SpringerLink (Online service)
• Μορφή: Ηλεκτρονική πηγή Ηλ. βιβλίο
• Γλώσσα: English
• Έκδοση: London : Springer London, 2010.
• Σειρά: Springer Series in Advanced Manufacturing,
• Θέματα: Engineering.; Surfaces (Physics).; Interfaces (Physical sciences).; Thin films.; Physical measurements.; Measurement.; Nanotechnology.; Control engineering.; Robotics.; Mechatronics.; Manufacturing industries.; Machines.; Tools.; Nanotechnology and Microengineering.; Surface and Interface Science, Thin Films.; Control, Robotics, Mechatronics.; Manufacturing, Machines, Tools.; Measurement Science and Instrumentation.

Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of surface forms of precision workpieces and to...

Πίνακας περιεχομένων:

• Angle Sensor for Measurement of Surface Slope and Tilt Motion
• Laser Autocollimator for Measurement of Multi-axis Tilt Motion
• Surface Encoder for Measurement of In-plane Motion
• Grating Encoder for Measurement of In-plane and Out-of-plane Motion
• Scanning Multi-probe System for Measurement of Roundness
• Scanning Error Separation System for Measurement of Straightness
• Scanning Micro-stylus System for Measurement of Micro-aspherics
• Large Area Scanning Probe Microscope for Micro-textured Surfaces
• Automatic Alignment Scanning Probe Microscope System for Measurement of 3D Nanostructures
• Scanning Image-sensor System for Measurement of Micro-dimensions.