Self-Powered and Soft Polymer MEMS/NEMS Devices

• Main Authors: Kottapalli, Ajay Giri Prakash (Author, http://id.loc.gov/vocabulary/relators/aut), Tao, Kai (http://id.loc.gov/vocabulary/relators/aut), Sengupta, Debarun (http://id.loc.gov/vocabulary/relators/aut), Triantafyllou, Michael S. (http://id.loc.gov/vocabulary/relators/aut)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Cham : Springer International Publishing : Imprint: Springer, 2019.
• Edition: 1st ed. 2019.
• Series: SpringerBriefs in Applied Sciences and Technology,
• Subjects: Biomedical engineering.; Biomaterials.; Nanotechnology.; Biotechnology.; Biomedical Engineering and Bioengineering.; Biomedical Engineering/Biotechnology.; Nanotechnology and Microengineering.; Microengineering.

This book explores the fabrication of soft material and biomimetic MEMS sensors, presents a review of MEMS/NEMS energy harvesters and self-powered sensors, and focuses on the recent efforts in developing flexible and wearable piezoelectric nanogenerators. It also includes a critical analysis of vari...