Toward Inertial-Navigation-on-Chip The Physics and Performance Scaling of Multi-Degree-of-Freedom Resonant MEMS Gyroscopes /

• Main Author: Wen, Haoran (Author, http://id.loc.gov/vocabulary/relators/aut)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Cham : Springer International Publishing : Imprint: Springer, 2019.
• Edition: 1st ed. 2019.
• Series: Springer Theses, Recognizing Outstanding Ph.D. Research,
• Subjects: Physical measurements.; Measurement .; Nanotechnology.; Nanoscale science.; Nanoscience.; Nanostructures.; Electronics.; Microelectronics.; Vibration.; Dynamical systems.; Dynamics.; Measurement Science and Instrumentation.; Nanotechnology and Microengineering.; Nanoscale Science and Technology.; Electronics and Microelectronics, Instrumentation.; Vibration, Dynamical Systems, Control.

This thesis develops next-generation multi-degree-of-freedom gyroscopes and inertial measurement units (IMU) using micro-electromechanical-systems (MEMS) technology. It covers both a comprehensive study of the physics of resonator gyroscopes and novel micro/nano-fabrication solutions to key performa...