Toward Inertial-Navigation-on-Chip The Physics and Performance Scaling of Multi-Degree-of-Freedom Resonant MEMS Gyroscopes /
This thesis develops next-generation multi-degree-of-freedom gyroscopes and inertial measurement units (IMU) using micro-electromechanical-systems (MEMS) technology. It covers both a comprehensive study of the physics of resonator gyroscopes and novel micro/nano-fabrication solutions to key performa...
Κύριος συγγραφέας: | |
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Συγγραφή απο Οργανισμό/Αρχή: | |
Μορφή: | Ηλεκτρονική πηγή Ηλ. βιβλίο |
Γλώσσα: | English |
Έκδοση: |
Cham :
Springer International Publishing : Imprint: Springer,
2019.
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Έκδοση: | 1st ed. 2019. |
Σειρά: | Springer Theses, Recognizing Outstanding Ph.D. Research,
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Θέματα: | |
Διαθέσιμο Online: | Full Text via HEAL-Link |
Πίνακας περιεχομένων:
- Chapter1: Introduction
- Chapter2: The physics of resonant mems gyroscopes
- Chapter3: Bias control in pitch and roll gyroscopes
- Chapter4: Scale-factor enhancement
- Chapter5: Integrated inertial measurement unit
- Chapter6: Bias stability limit in resonant gyroscopes
- Chapter7: Conclusions and future work.